ASTM-E2090 › Historical Revision Information
Standard Test Method for Size-Differentiated Counting of Particles and Fibers Released from Cleanroom Wipers Using Optical and Scanning Electron Microscopy
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Scope
1.1 This test method covers testing all wipers used in cleanrooms and other controlled environments for characteristics related to particulate cleanliness.
1.2 This test method includes the use of computer-based image analysis and counting hardware and software for the counting of densely particle-laden filters (see ). While the use of this equipment is not absolutely necessary, it is strongly recommended to enhance the accuracy, speed, and consistency of counting.
1.3 The values stated in SI units are to be regarded as the standard.
This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
Significance and Use
This test method provides for accurate and reproducible enumeration of particles and fibers released from a wiper immersed in a cleaning solution with moderate mechanical stress applied. When performed correctly, this counting test method is sensitive enough to quantify very low levels of total particle and fiber burden. The results are accurate and not influenced by artifact or particle size limitations. A further advantage to this technique is that it allows for morphological as well as X-ray analysis of individual particles.
Keywords
cleanroom wipers; contamination control; membrane filter; optical microscopy; particle counting and sizing; particles and fibers; scanning electron microscopy; ICS Number Code 13.040.35 (Cleanrooms and associated controlled environments)
To find similar documents by ASTM Volume:
15.03 (Space Simulation; Aerospace and Aircraft; Composite Materials)
To find similar documents by classification:
13.040.35 (Cleanrooms and associated controlled environments)
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Document Number
ASTM-E2090-06
Revision Level
2006 EDITION
Status
Superseded
Modification Type
Revision with Title Change
Publication Date
Nov. 1, 2006
Document Type
Test Method
Page Count
11 pages
Committee Number
E21.05