ASTM-F1152 › Complete Document History
Standard Test Method for Dimensions of Notches on Silicon Wafers (Withdrawn 2003)


Obsolete Revision Information:
   2002 EDITION - DIMENSIONS OF NOTCHES ON SILIC - Jan. 10, 2002
   1993 R01 EDITION - REAPPROVED IN 2001 - Aug. 15, 1993
   1993 EDITION - DIMENSIONS OF NOTCHES ON SILIC - Aug. 15, 1993
   1988 EDITION - DIMENSIONS OF NOTCHES ON SILIC - May 27, 1988