ASTM-F1189 › Test Method for Using Computer-Assisted Infrared Spectrophotometry to Measure the Interstitial Oxygen Content of Silicon Slices Polished on Both Sides (Withdrawn 1993)
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Test Method for Using Computer-Assisted Infrared Spectrophotometry to Measure the Interstitial Oxygen Content of Silicon Slices Polished on Both Sides (Withdrawn 1993)
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ICS Number Code 29.045 (Semiconducting materials)
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29.045 (Semiconducting materials)
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Document Number
ASTM-F1189-88
Revision Level
1988 EDITION
Status
Superseded
Modification Type
Withdrawn
Publication Date
Oct. 31, 1988
Document Type
Test Method
Page Count
4 pages