ASTM-F1261M › Standard Test Method for Determining the Average Electrical Width of a Straight, Thin-Film Metal Line [Metric] (Withdrawn 2009)
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Scope
1.1 This test method is designed for determining the average electrical width of a narrow thin-film metallization line.
1.2 This test method is intended for measuring thin metallization lines such as are used in microelectronic circuits where the width of the lines may range from micrometres to tenths of micrometres.
1.3 The test structure used in this test method may be measured while still part of a wafer, or part therefrom, or as part of a test chip bonded to a package and electrically accessible by means of package terminals.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
Keywords
aluminum; electrical interconnect; electrical linewidth; linewidth; metallization; semiconductor; test structure; thin film
To find similar documents by ASTM Volume:
10.04 (Electronics; Declarable Substances in Materials; 3D Imaging Systems)
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Document Number
ASTM-F1261M-96(2003)
Revision Level
1996 R03 EDITION
Status
Cancelled
Modification Type
Withdrawn
Publication Date
July 10, 2003
Document Type
Test Method
Page Count
4 pages
Committee Number
F01.11