Document Center is acquired by Nimonik

Scope

1.1 The purpose of this test method is to define a method for analyzing the surface texture of the above-mentioned components using a scanning tunneling microscope (STM). STM is a noncontact method of surface profiling that can measure three-dimensional surface features in the nanometer size range, which can then be used to represent the surface texture or to provide figures of merit. Application of this test method, where surface texture is used as a selection criterion, is expected to yield comparable data among different components tested.

1.2 Limitations:

1.2.1 This test method is limited to characterization of stainless steel surfaces that are smoother than Ra = 0.25 [mu]m, as determined by a contact-stylus profilometer and defined by ANSI B46.1. The magnifications and height scales used in this test method were chosen with this smoothness in mind.

1.2.2 Intentional etching or conductive coating of the surface are considered modifications of the gas-wetted surface and are not covered by this test method.

1.2.3 This test method does not cover steels that have an oxide layer too thick to permit tunneling under the test conditions outlined in 11.3.

1.3 This technique is written with the assumption that the STM operator understands the use of the instrument, its governing principles, and any artifacts that can arise. Discussion of these points is beyond the scope of this test method.

1.4 The values stated in SI units are to be regarded as the standard.

1.5 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Keywords

Gas distribution systems; Microscopic examination-electronic materials; Roughness; Scanning tunneling microscopy; Semiconductor clean rooms; Stainless steel-gas distribution systems; Surface analysis-electronic components/devices; Texture; Topography; Tunneling; gas distribution system components-surface roughness, by scanning; tunneling microscopy, test; ICS Number Code 17.040.20 (Properties of surfaces)

To find similar documents by ASTM Volume:

10.04 (Electronics; Declarable Substances in Materials; 3D Imaging Systems)

To find similar documents by classification:

17.040.20 (Properties of surfaces)

This document comes with our free Notification Service, good for the life of the document.

This document is available in either Paper or PDF format.