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Scope

This standard was transferred to SEMI (www.semi.org) May 2003

1.1 This guide covers the procedures for producing a single set of consensus reference materials (ConRefs) in the absence of suitable certified reference materials from an established source.

1.2 This guide covers the steps to be taken to generate a set of ConRefs for a specific property or family of related properties required in semiconductor technology.

1.3 The procedure for generating the set of ConRefs is based on interlaboratory testing in accordance with Practice E691. It is assumed for the purposes of this guide that the test method evaluated by the interlaboratory study (ILS) is appropriate for determining the property values of the ConRef. This guide does not cover the selection of one of several possible test methods nor does it cover the case for which other reference materials must be used in the measurement of the properties of the ConRef.

1.4 This guide also describes procedures that may be used to generate consensus property values that may form the basis for the generation of multiple sets of CRMs or reference materials (RMs).

Keywords

certified reference material; consensus reference material; flat panel display; interlaboratory experiment; reference material; semiconductor; silicon; sputtering target; working reference material; ICS Number Code 29.045 (Semiconducting materials)

To find similar documents by ASTM Volume:

10.04 (Electronics; Declarable Substances in Materials; 3D Imaging Systems)

To find similar documents by classification:

29.045 (Semiconducting materials)

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