ASTM-F1894 › Complete Document History
Test Method for Quantifying Tungsten Silicide Semiconductor Process Films for Composition and Thickness
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1998 R11 EDITION - REAPPROVED IN 2011 - July 1, 2011
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Obsolete Revision Information: |
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1998 R03 EDITION - REAPPROVED IN 2003 - Dec. 1, 2003
1998 EDITION - QUANTIFYING TUNGSTEN SILICIDE - May 10, 1998 |