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Scope

This standard was transferred to SEMI (www.semi.org) May 2003

1.1 This guide defines standardized positions for measuring diameter of circular wafers of silicon and other semiconducting materials that contain flats or notches on the periphery. It was developed for use with silicon wafers with standard diameter and flat positions as given in SEMI Specifications M1.

1.2 It may be applied to other semiconductor wafers if the flat locations are properly taken into account.

1.3 Wafers of any size can be measured provided that suitable test jigs and instruments are available.

1.4 Roundness of wafers cannot be determined from measurements made solely at the positions defined in this guide. No information is provided concerning the diameter of the wafer at points other than those measured.

Keywords

silicon; diameter; semiconducting materials; silicon wafers; ICS Number Code 29.045 (Semiconducting materials)

To find similar documents by ASTM Volume:

10.04 (Electronics; Declarable Substances in Materials; 3D Imaging Systems)

To find similar documents by classification:

29.045 (Semiconducting materials)

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