ASTM-F374 › Complete Document History
Standard Test Method for Sheet Resistance of Silicon Epitaxial, Diffused, Polysilicon, and Ion-implanted Layers Using an In-Line Four-Point Probe with the Single-Configuration Procedure (Withdrawn 2003)
Obsolete Revision Information: |
2002 EDITION - Sheet Resistance of Silicon Epitaxial, Diffused, Polysilicon - Dec. 10, 2002
2000A EDITION - Sheet Resistance of Silicon Epitaxial, Diffused, Polysilicon - Dec. 10, 2000
1994A EDITION - Sheet Resistance of Silicon Epitaxial, Diffused, Polysilicon - Aug. 15, 1994
1994 EDITION - Sheet Resistance of Silicon Epitaxial, Diffused, Polysilicon - April 15, 1994
1988 EDITION - Sheet Resistance of Silicon Epitaxial, Diffused, Polysilicon - Oct. 31, 1988
1984 EDITION - Sheet Resistance of Silicon Epitaxial, Diffused, Polysilicon - Jan. 27, 1984
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