ASTM-F671 › Complete Document History
Standard Test Method for Measuring Flat Length on Wafers of Silicon and Other Electronic Materials (Withdrawn 2003)


Obsolete Revision Information:
   1999 EDITION - Measuring Flat Length on Wafers of Silicon and Other Electro - Dec. 10, 1999
   1990 R94(E1) EDITION - EDITORIALLY CORRECTED - Sept. 1, 1994
   1990 EDITION - Measuring Flat Length on Wafers of Silicon and Other Electro - June 29, 1990
   1990 R99 EDITION - REAPPROVED IN 1999 - June 29, 1990
   1988 EDITION - Measuring Flat Length on Wafers of Silicon and Other Electro - Oct. 31, 1988