BS-EN-ISO-14644-9 › Cleanrooms and associated controlled environments
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Cleanrooms and associated controlled environments
Keywords
Environmental cleanliness;Contamination;Molecules;Clean rooms;Surfaces;Environment (working);Chemical analysis and testing;Cleaning equipment
To find similar documents by classification:
13.040.35 (Cleanrooms and associated controlled environments)
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Document Number
BS EN ISO 14644-9:2022
Revision Level
2022 EDITION
Status
Current
Publication Date
July 8, 2022
Replaces
BS EN ISO 14644-9:2012
Page Count
40
ISBN
9780539161243
International Equivalent
EN ISO 14644-9;ISO 14644-9
Committee Number
LBI/30