BS-ISO-13083 › Surface chemical analysis. Scanning probe microscopy. Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes
BS-ISO-13083
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2015 EDITION
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CURRENT
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Surface chemical analysis. Scanning probe microscopy. Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes
Keywords
Surface properties;Surfaces;Sampling methods;Microscopes;Data representation;Chemical analysis and testing;Calibration;Surface chemistry
To find similar documents by classification:
71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)
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Document Number
BS ISO 13083:2015
Revision Level
2015 EDITION
Status
Current
Publication Date
Aug. 31, 2015
Page Count
26
ISBN
9780580677519
International Equivalent
ISO 13083:2015
Committee Number
CII/60