BS-ISO-14237 › Surface chemical analysis. Secondary-ion mass spectrometry. Determination of boron atomic concentration in silicon using uniformly doped materials

BS-ISO-14237 - 2010 EDITION - CURRENT
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Surface chemical analysis. Secondary-ion mass spectrometry. Determination of boron atomic concentration in silicon using uniformly doped materials

Keywords

Surface properties;Ions;Specimen preparation;Concentration (chemical);Single;Control samples;Calibration;Doping agents;Secondary;Determination of content;Boron;Silicon;Isotopes;Homogeneity;Surface chemistry;Mathematical calculations;Performance testing;Semiconductor technology;Chemical analysis and testing;Statistical methods of analysis;Mass spectrometry;Spectroscopy;Crystals;Precision;Test equipment

To find similar documents by classification:

71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)

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Document Number

BS ISO 14237:2010

Revision Level

2010 EDITION

Status

Current

Publication Date

Aug. 31, 2010

Replaces

BS ISO 14237:2000

Page Count

30

ISBN

9780580574023

International Equivalent

ISO 14237:2010

Committee Number

CII/60