BS-ISO-18516 › Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Determination of lateral resolution
BS-ISO-18516
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2006 EDITION
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CURRENT
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Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Determination of lateral resolution
Keywords
Spectroscopy;Dimensional measurement;Resolution;Photoelectron spectroscopy;Side;Electron emission;Surfaces;Straight;Surface chemistry;Chemical analysis and testing;X-ray photoelectron spectroscopy;Auger electron spectroscopy;Electron physics
To find similar documents by classification:
71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)
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Document Number
BS ISO 18516:2006
Revision Level
2006 EDITION
Status
Current
Publication Date
Nov. 30, 2006
Page Count
34
ISBN
0580496104
International Equivalent
ISO 18516:2006
Committee Number
CII/60