BS-ISO-21859 › Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment
BS-ISO-21859
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2019 EDITION
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CURRENT
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Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment
Keywords
Semiconductor manufacture;Components;Plasma;Test methods;Ceramics;Special ceramics
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Document Number
BS ISO 21859:2019
Revision Level
2019 EDITION
Status
Current
Publication Date
June 19, 2019
Page Count
12
ISBN
9780580962011
International Equivalent
ISO 21859
Committee Number
RPI/13