BS-ISO-23170 › Surface chemical analysis. Depth profiling. Non-destructive depth profiling of nanoscale heavy metal oxide thin films on Si substrates with medium energy ion scattering
BS-ISO-23170
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2022 EDITION
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CURRENT
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Surface chemical analysis. Depth profiling. Non-destructive depth profiling of nanoscale heavy metal oxide thin films on Si substrates with medium energy ion scattering
Keywords
Control surfaces;Testing;Chemical methods of analysis;Chemical tests;Laboratories (chemical);Reactions (chemical)
To find similar documents by classification:
71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)
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Document Number
BS ISO 23170:2022
Revision Level
2022 EDITION
Status
Current
Publication Date
Aug. 3, 2022
Page Count
38
ISBN
9780539144734
International Equivalent
ISO 23170
Committee Number
CII/60