DD-ISO-15969 › Historical Revision Information
Surface chemical analysis. Depth profiling. Measurement of sputtered depth
Surface Chemical Analysis, Depth Profiling, Measurement of Sputtered Depth
To find similar documents by classification:
17.040.20 (Properties of surfaces)
71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)
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Document Number
DD-ISO-15969
Revision Level
REPLACED BY DD-ISO/TR-15969
Status
Superseded
Publication Date
Oct. 1, 2001