ISO-13424 › Surface chemical analysis - X-ray photoelectron spectroscopy - Reporting of results of thin-film analysis

ISO-13424 - 1ST EDITION - CURRENT


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ISO 13424:2013 specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.

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71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)

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Document Number

ISO 13424:2013

Revision Level

1ST EDITION

Status

Current

Publication Date

Oct. 1, 2013

Committee Number

ISO/TC 201/SC 7