ISO-14644-12 › Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
The following bibliographic material is provided to assist you with your purchasing decision:
This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.
For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less ? "nanoscale" ? are considered.
The monitoring given in this document is for use mainly in "operational" states.
NOTE 1 For the purposes of this document, reference is made to "nanoscale particles", which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale.
NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc.
NOTE 3 Health and safety considerations are excluded from this document.
To find similar documents by classification:
13.040.35 (Cleanrooms and associated controlled environments)
This document comes with our free Notification Service, good for the life of the document.
This document is available in either Paper or PDF format.
Customers who bought this document also bought:
ASTM-A480Standard Specification for General Requirements for Flat-Rolled Stainless and Heat-Resisting Steel Plate, Sheet, and Strip
ASTM-A276
Standard Specification for Stainless Steel Bars and Shapes
ASTM-A249
Standard Specification for Welded Austenitic Steel Boiler, Superheater, Heat-Exchanger, and Condenser Tubes
Document Number
ISO 14644-12:2018
Revision Level
1ST EDITION
Status
Current
Publication Date
Aug. 1, 2018
Committee Number
ISO/TC 209