ISO-18115-3 › Surface chemical analysis - Vocabulary - Part 3: Terms used in optical interface analysis

ISO-18115-3 - 1ST EDITION - CURRENT


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This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.

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01.040.71 (Chemical technology (Vocabularies))

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Document Number

ISO 18115-3:2022

Revision Level

1ST EDITION

Status

Current

Publication Date

July 1, 2022

Committee Number

ISO/TC 201/SC 1