ISO-22278 Fine ceramics (advanced ceramics, advanced technical ceramics) - Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

ISO-22278 - 1ST EDITION - CURRENT


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This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.

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Document Number

ISO 22278:2020

Revision Level

1ST EDITION

Status

Current

Publication Date

Aug. 1, 2020

Committee Number

ISO/TC 206