ISO-22278 › Fine ceramics (advanced ceramics, advanced technical ceramics) - Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam
ISO-22278
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1ST EDITION
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CURRENT
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This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.
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Document Number
ISO 22278:2020
Revision Level
1ST EDITION
Status
Current
Publication Date
Aug. 1, 2020
Committee Number
ISO/TC 206