ISO-22933 Surface chemical analysis - Secondary ion mass spectrometry - Method for the measurement of mass resolution in SIMS

ISO-22933 - 1ST EDITION - CURRENT


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This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.

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Document Number

ISO/TS 22933:2022

Revision Level

1ST EDITION

Status

Current

Publication Date

April 1, 2022

Committee Number

ISO/TC 201/SC 6