ISO-22933 › Surface chemical analysis - Secondary ion mass spectrometry - Method for the measurement of mass resolution in SIMS
ISO-22933
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1ST EDITION
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CURRENT
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This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.
To find similar documents by classification:
71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)
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Document Number
ISO/TS 22933:2022
Revision Level
1ST EDITION
Status
Current
Publication Date
April 1, 2022
Committee Number
ISO/TC 201/SC 6