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This document specifies a glow discharge optical emission spectrometric method for the determination of the thickness and mass per unit area of single and metallic nanolayers on iron-based substrates.

This method is applicable to single and metallic nanolayers, 10 nm to 100 nm thick, on iron-based substrates. The metallic elements of the layers are Cr, Ni, Ti, Mn and Al. Other elements that can be determined according to this document are P and S.