ISO-27911 › Surface chemical analysis - Scanning-probe microscopy - Definition and calibration of the lateral resolution of a near-field optical microscope
ISO-27911
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1ST EDITION
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CURRENT
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ISO 27911:2011 describes a method for determining the spatial (lateral) resolution of an apertured near-field scanning optical microscope (NSOM) by imaging an object with a size much smaller than the expected resolution. It is applicable to aperture-type NSOMs operated in the transmission, reflection, collection or illumination/collection mode.
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71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)
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Document Number
ISO 27911:2011
Revision Level
1ST EDITION
Status
Current
Publication Date
Aug. 1, 2011
Committee Number
ISO/TC 201/SC 9