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This document defines terms related to nanomanufacturing processes in the field of nanotechnologies.

All the process terms in this document are relevant to nanomanufacturing, however, many of the listed processes are not exclusively relevant to the nanoscale. Terms that are not exclusive are noted within the definitions. Depending on controllable conditions, such processes can result in material features at the nanoscale or, alternatively, at larger scales.

There are many other terms that name tools, components, materials, systems control methods or metrology methods associated with nanomanufacturing that are beyond the scope of this document.

Terms and definitions from other parts of the ISO/TS 80004 series are reproduced in Clause 3 for context and better understanding.