ISO/DIS-14644-12 › Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
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Document Number
ISO/DIS 14644-12
Revision Level
1ST EDITION DRAFT
Status
Superseded
Publication Date
Oct. 27, 2016