PD-IEC-63258 › Nanotechnologies. A guideline for ellipsometry application to evaluate the thickness of nanoscale films
PD-IEC-63258
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2021 EDITION
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CURRENT
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Nanotechnologies. A guideline for ellipsometry application to evaluate the thickness of nanoscale films
Keywords
Nanoparticles;Particulate materials;Materials by form;Nanomaterials;Nanotechnology
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Document Number
PD IEC TR 63258:2021
Revision Level
2021 EDITION
Status
Current
Publication Date
March 26, 2021
Page Count
24
ISBN
9780539009309
International Equivalent
ISO/TR 23397
Committee Number
NTI/1