PD-ISO-16268 › Surface chemical analysis. Proposed procedure for certifying the retained areic dose in a working reference material produced by ion implantation
PD-ISO-16268
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2009 EDITION
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CURRENT
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Surface chemical analysis. Proposed procedure for certifying the retained areic dose in a working reference material produced by ion implantation
Keywords
Control samples;Substrates (insulating);Chemical analysis and testing;Surface chemistry;Surfaces;Ions;Measurement;Silicon;Certification (approval)
To find similar documents by classification:
71.040.30 (Chemical reagents Including reference materials)
71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)
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Document Number
PD ISO/TR 16268:2009
Revision Level
2009 EDITION
Status
Current
Publication Date
Nov. 30, 2009
Page Count
30
ISBN
9780580557644
International Equivalent
ISO/TR 16268:2009
Committee Number
CII/60