PD-ISO-19319 › Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

PD-ISO-19319 - 2013 EDITION - CURRENT
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Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

Keywords

Auger electron spectroscopy;Surface chemistry;Electron emission;Photoelectron spectroscopy;Chemical analysis and testing;Spectroscopy;Resolution;Area;Surfaces;Chemical composition;X-ray photoelectron spectroscopy

To find similar documents by classification:

71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)

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Document Number

PD ISO/TR 19319:2013

Revision Level

2013 EDITION

Status

Current

Publication Date

March 31, 2013

Replaces

PD ISO/TR 19319:2003

Page Count

126

ISBN

9780580711862

International Equivalent

ISO/TR 19319:2013

Committee Number

CII/60