SS-EN-ISO-14644-9 Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentration (ISO 14644-9:2022)

SS-EN-ISO-14644-9 - 2022 EDITION - CURRENT
Show Complete Document History

Document Center Inc. is an authorized dealer of SIS standards.
The following bibliographic material is provided to assist you with your purchasing decision:


This document establishes a procedure for the assessment of particle cleanliness levels on solid surfaces in cleanrooms and associated controlled environment applications. Recommendations on testing and measuring methods, as well as information about surface characteristics, are given in Annexes A to D. This document applies to all solid surfaces in cleanrooms and associated controlled environments, such as walls, ceilings, floors, working environments, tools, equipment and products. The procedure for the assessment of surface cleanliness by particle concentration (SCP) is limited to particles of between 0,05 µm and 500 µm. The following issues are not considered in this document: —    requirements for the cleanliness and suitability of surfaces for specific processes; —    procedures for the cleaning of surfaces; —    material characteristics; —    references to interactive bonding forces or generation processes that are usually time-dependent and process-dependent; —    selection and use of statistical methods for assessment and testing; —    other characteristics of particles, such as electrostatic charge, ionic charges and microbiological state.

To find similar documents by classification:

13.040.35 (Cleanrooms and associated controlled environments)

This document comes with our free Notification Service, good for the life of the document.

This document is available in either Paper or PDF format.

ORDER

Price:

$156.75        


Want this as a site license?



Designation Name

SS-EN ISO 14644-9:2022

Revision Level

2022 EDITION

Status

Current

Publication Date

May 30, 2022

Language(s)

English

Page Count

40

International Equivalent

EN ISO 14644-9:2022(IDT); ISO 14644-9:2022(IDT)