SS-EN-ISO-23131 › Ellipsometry - Principles (ISO 23131:2021)

SS-EN-ISO-23131 - 2022 EDITION - CURRENT


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This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories. It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.

To find similar documents by classification:

17.020 (Metrology and measurement in general Including measuring instruments in general, preferred numbers, standard measures, general aspects of reference materials, etc. Quantities and units, see 01.060 Chemical reference materials, see 71.040.30)

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Designation Name

SS-EN ISO 23131:2022

Revision Level

2022 EDITION

Status

Current

Publication Date

Nov. 18, 2022

Language(s)

English

Page Count

28

International Equivalent

EN ISO 23131:2022(IDT); ISO 23131:2021(IDT)