ASTM-D5127 Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries

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Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries




1.1 This guide provides recommendations for water quality related to electronics and semiconductor-industry manufacturing. Seven classifications of water are described, including water for line widths as low as 0.032 μm. In all cases, the recommendations are for water at the point of distribution (POD).

1.2 Water is used for washing and rinsing of semiconductor components during manufacture. Water is also used for cleaning and etching operations, making steam for oxidation of silicon surfaces, preparing photomasks, and depositing luminescent materials. Other applications are in the development and fabrication of solid-state devices, thin-film devices, communication lasers, light-emitting diodes, photo-detectors, printed circuits, memory devices, vacuum-tube devices, or electrolytic devices.

1.3 Users needing water qualities different from those described here should consult other water standards, such as Specification D1193 and Guide D5196.

1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.

1.5 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.


electronic; microelectronics; semiconductor; ultra-pure water;; ICS Number Code 13.060.25 (Water for industrial use); 71.100.99 (Other products of the chemical industry)

To find similar documents by ASTM Volume:

11.01 (Water (I))

To find similar documents by classification:

13.060.25 (Water for industrial use Including water for commercial use: for swimming pools, fish breeding, etc.)

71.100.99 (Other products of the chemical industry)

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Document Number


Revision Level

2013 R18 EDITION



Modification Type


Publication Date

Oct. 15, 2018

Document Type


Page Count

6 pages

Committee Number