ASTM-D5127 Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries

ASTM-D5127 - 2013 EDITION - CURRENT
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Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries
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Scope

1.1 This guide provides recommendations for water quality related to electronics and semiconductor-industry manufacturing. Seven classifications of water are described, including water for line widths as low as 0.032 micron. In all cases, the recommendations are for water at the point of distribution (POD).

1.2 Water is used for washing and rinsing of semiconductor components during manufacture. Water is also used for cleaning and etching operations, making steam for oxidation of silicon surfaces, preparing photomasks, and depositing luminescent materials. Other applications are in the development and fabrication of solid-state devices, thin-film devices, communication lasers, light-emitting diodes, photo-detectors, printed circuits, memory devices, vacuum-tube devices, or electrolytic devices.

1.3 Users needing water qualities different from those described here should consult other water standards, such as Specification D1193 and Guide D5196.

1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Keywords

electronic; microelectronics; semiconductor; ultra-pure water; ICS Number Code 13.060.25 (Water for industrial use); 71.100.99 (Other products of the chemical industry)

To find similar documents by ASTM Volume:

11.01 (Water (I))

To find similar documents by classification:

13.060.25 (Water for industrial use Including water for commercial use: for swimming pools, fish breeding, etc.)

71.100.99 (Other products of the chemical industry)

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Document Number

ASTM-D5127-13

Revision Level

2013 EDITION

Status

Current

Modification Type

Revision

Publication Date

March 15, 2013

Document Type

Guide

Page Count

6 pages

Committee Number

D19.02