ASTM-E1577 Standard Guide for Reporting of Ion Beam Parameters Used in Surface Analysis (Withdrawn 2020)

Show Complete Document History

Document Center Inc. is an authorized dealer of ASTM standards.
The following bibliographic material is provided to assist you with your purchasing decision:

Standard Guide for Reporting of Ion Beam Parameters Used in Surface Analysis (Withdrawn 2020)


1.1 This guide covers the information needed to characterize ion beams used in surface analysis.

1.2 This guide does not cover all information required to perform a sputter depth profile (see referenced documents), specify any properties of the specimen except its surface normal, and discuss the rationale for choosing a particular set of ion beam parameters (1,7). This guide does assume that the ion flux has a unique direction, that is, is an ion beam, rather than a wide spectrum of velocity vectors more typical of a plasma.

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Significance and Use

Ion beams are utilized in surface analysis in two ways. First, they can generate signals from the specimen, for example, in SIMS and ISS. Second, they can remove material from the specimen surface while a surface analytical technique determines the composition of the freshly exposed surface. This process is called sputter depth profiling. Ideally, this guide requires reporting all characteristics of the ion beam that can possibly affect the results so that the measurement can be reproduced.


ion beam sputtering; surface analysis

To find similar documents by ASTM Volume:

03.06 (Molecular Spectroscopy; Surface Analysis)

To find similar documents by classification:

17.040.20 (Properties of surfaces)

This document comes with our free Notification Service, good for the life of the document.

This document is available in either Paper or PDF format.

Document Number


Revision Level




Modification Type


Publication Date

July 1, 2011

Document Type


Page Count

3 pages

Committee Number