ASTM-E2734 › Standard Specification for Dimensions of Knife-Edge Flanges
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Scope
1.1 This standard specifies the dimensions of knife-edge style flanges and their associated gaskets used in vacuum systems for pressures ranging from 105 Pa to 10-11 Pa. Such flanges are widely used throughout vacuum technology applications in semiconductor processing tools, surface analysis systems, space simulation systems, and general research requiring vacuum.
1.2 The values stated in either SI units or inch-pound units are to be regarded separately as standard. The values stated in each system may not be exact equivalents; therefore, each system shall be used independently of the other. Combining values from the two systems may result in non-conformance with the standard.
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.
1.4 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
Keywords
flange; gasket; knife-edge; metal gasket; metal seal; outgassing; rotatable flange; vacuum fitting; vacuum hardware; vacuum seal;; ICS Number Code 23.160 (Vacuum technology)
To find similar documents by ASTM Volume:
03.06 (Molecular Spectroscopy; Surface Analysis)
To find similar documents by classification:
23.160 (Vacuum technology Including vacuum pumps)
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Document Number
ASTM-E2734/E2734M-10(2018)
Revision Level
2010 R18 EDITION
Status
Current
Modification Type
Reapproval
Publication Date
June 1, 2018
Document Type
Specification
Page Count
4 pages
Committee Number
E42.13