ASTM-E766 Standard Practice for Calibrating the Magnification of a Scanning Electron Microscope

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Standard Practice for Calibrating the Magnification of a Scanning Electron Microscope




1.1 This practice covers general procedures necessary for the calibration of magnification of scanning electron microscopes. The relationship between true magnification and indicated magnification is a complicated function of operating conditions.2 Therefore, this practice must be applied to each set of standard operating conditions to be used.

1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.


calibration; magnification; pitch; scanning electron microscope; SEM;; ICS Number Code 37.020 (Optical equipment)

To find similar documents by ASTM Volume:

03.01 (Metals -- Mechanical Testing; Elevated and Low-Temperature Tests; Metallography)

To find similar documents by classification:

37.020 (Optical equipment Including microscopes, telescopes, binoculars, optical materials, optical components and optical systems Ophthalmic equipment, see 11.040.70 Optical measuring instruments, see 17.180.30 Photographic equipment lenses, see 37.040.10)

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Document Number


Revision Level

2014(E1) EDITION



Modification Type

Editorially changed

Publication Date

May 15, 2016

Document Type


Page Count

6 pages

Committee Number