ASTM-E766 › Standard Practice for Calibrating the Magnification of a Scanning Electron Microscope
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1.1 This practice is designed to calibrate the magnification of scanning electron microscopes (SEMs) using the National Institute of Standards and Technology (NIST) calibration specimen Standard Reference Material (SRM)484. Since the relationship between true magnification and magnification indicated on the SEM readout may be different at different magnifications, this practice must be applied to each magnification for which true magnification is desired.
1.2 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
Calibration-microscopes; Scanning electron microscope (SEM); scanning electron microscopes (SEM's), practice,; Electron microscopy; Scanning electron microscope (SEM); calibrating the magnification of scanning electron microscopes (SEM's),; practice; ICS Number Code 37.020 (Optical equipment)
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37.020 (Optical equipment Including microscopes, telescopes, binoculars, optical materials, optical components and optical systems Ophthalmic equipment, see 11.040.70 Optical measuring instruments, see 17.180.30 Photographic equipment lenses, see 37.040.10)
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2014 R19 EDITION
Nov. 19, 2019