ASTM-F1152 › Standard Test Method for Dimensions of Notches on Silicon Wafers (Withdrawn 2003)
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Scope
This standard was transferred to SEMI (www.semi.org) May 2003
1.1 This test method covers a nondestructive procedure to determine whether or not the dimensions of fiducial notches on silicon wafers fall within specified limits.
1.2 The values stated in SI units are to be regarded as the standard. The values given in parentheses are for information only.
1.3 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
Keywords
notch; notch dimension; optical comparator; silicon; wafer; ICS Number Code 29.045 (Semiconducting materials)
To find similar documents by ASTM Volume:
10.04 (Electronics; Declarable Substances in Materials; 3D Imaging Systems)
To find similar documents by classification:
29.045 (Semiconducting materials)
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Document Number
ASTM-F1152-02
Revision Level
2002 EDITION
Status
Superseded
Modification Type
Withdrawn
Publication Date
Jan. 10, 2002
Document Type
Test Method
Page Count
4 pages
Committee Number
F01.06