ASTM-F1226 Standard Test Method for Calibration of Liquid-Borne Particle Counters for Submicrometer Particle Sizing (Withdrawn 2002)

ASTM-F1226 - 1989 R94(E1) EDITION - CANCELLED
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Standard Test Method for Calibration of Liquid-Borne Particle Counters for Submicrometer Particle Sizing (Withdrawn 2002)

Scope

1.1 This test method describes a procedure for establishing the sizing accuracy of an automatic, optical liquid-borne single particle counter, using light scattering automatic particle counter (APC). This test method is directed at determining the sizing accuracy of the APC when it is used to measure a challenge suspension of precisely-sized spherical isotropic particles, particularly those sized at and below 1 [mu]m in diameter.

1.2 The particle size parameter that is reported is the equivalent diameter based on the projected area of an isotropic spherical particle of known composition suspended in a liquid that is optically different from the suspended particle. Particles in the size range of 0.1 [mu]m and 5 [mu]m are used for calibration in this procedure.

1.3 This test method does not provide a procedure for APC counting accuracy calibration, since that procedure is available in Practice F658. However, some knowledge of APC maximum concentration capability is necessary in order to avoid introduction of sizing errors as a result of excessive particle concentration during the sizing calibration procedure.

1.4 The values stated in SI units are to be regarded as the standard. The values given in parentheses are for information only.

1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. For hazard statement, see Section 8.

Keywords

Calibration-particle analysis instrumentation; Calibration-semiconductor analysis instrumentation; liquid-borne particle counters for submicrometer particle sizing, test,; Chemicals; Cleanliness; Electronic materials/applications; Light-transmission and reflection; Liquids; Mechanical manufacturing devices; Optical materials/properties/tests-semiconductors; Particle counters; Pharmaceutical industry; Size; Spherical particles; Submicrometer particle sizing; Suspension tests; calibration of liquid-borne particle counters for submicrometer particle; sizing accuracy, test; ICS Number Code 13.060.50 (Examination of water for chemical substances)

To find similar documents by ASTM Volume:

10.04 (Electronics; Declarable Substances in Materials; 3D Imaging Systems)

To find similar documents by classification:

13.060.50 (Examination of water for chemical substances)

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This document is available in Paper format.

Document Number

ASTM-F1226-89(1994)e1

Revision Level

1989 R94(E1) EDITION

Status

Cancelled

Modification Type

Withdrawn

Publication Date

Sept. 1, 1994

Document Type

Test Method

Page Count

5 pages

Committee Number

F01.10