ASTM-F1709 Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications

ASTM-F1709 - 1997 R16 EDITION - CURRENT
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This specification covers high purity titanium sputtering targets for use as raw material in the fabrication of semiconductor electronic thin films. Material covered by this specification comprises Grades 4N, 4N5, and 5N titanium sputtering targets, the grades of which are based on the total metallic impurity content. The target shall be manufactured free of any contaminates such as dirt or oils and with average and maximum grain sizes in conformity with the requirements specified. The target shall be analyzed for trace metallic impurities, carbon, oxygen, sulfur, nitrogen, and hydrogen and shall conform to the grade requirements and the acceptable and minimum detection limits specified.

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Scope

1.1 This specification covers pure titanium sputtering targets used as a raw material in fabricating semiconductor electronic devices.

1.2 This standard sets purity grade levels, physical attributes, analytical methods, and packaging.

1.2.1 The grade designation is a measure of total metallic impurity content. The grade designation does not necessarily indicate suitability for a particular application because factors other than total metallic impurity may influence performance.

Keywords

coating; sputtering; target; thin film; titanium ;; ICS Number Code 31.120 (Electronic display devices)

To find similar documents by ASTM Volume:

10.04 (Electronics; Declarable Substances in Materials; 3D Imaging Systems)

To find similar documents by classification:

31.120 (Electronic display devices Including liquid crystal displays)

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Document Number

ASTM-F1709-97(2016)

Revision Level

1997 R16 EDITION

Status

Current

Modification Type

Reapproval

Publication Date

May 15, 2016

Document Type

Specification

Page Count

3 pages

Committee Number

F01.17