ASTM-F612 › Practice for Cleaning Surfaces of Polished Silicon Slices (Withdrawn 1993)
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Practice for Cleaning Surfaces of Polished Silicon Slices (Withdrawn 1993)
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ICS Number Code 29.045 (Semiconducting materials)
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Document Number
ASTM-F612-88
Revision Level
1988 EDITION
Status
Cancelled
Modification Type
Withdrawn
Publication Date
Oct. 31, 1988
Document Type
Practice
Page Count
2 pages