ASTM-F91 › Standard Practice for Testing for Leaks in the Filters Associated With Laminar Flow Clean Rooms and Clean Work Stations by Use of a Condensation Nuclei Detector
Show Complete Document History
The following bibliographic material is provided to assist you with your purchasing decision:
1.1 This practice covers the testing of the integrity of high-efficiency particulate air (HEPA) filters installed in laminar flow clean rooms of the ceiling to floor or wall to wall type, and laminar flow clean work stations. The recommended practice may be used to detect faults or voids in the filter media itself or in the joints between the filter and the room or work station structure. The determination of filter media efficiency is not within the scope of this practice.
1.2 The values stated in inch-pound units are to be regarded as the standard. The values given in parentheses are for information only.
1.3 This standard may involve hazardous materials, operations, and equipment. This standard does not purport to address all of the safety problems associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
Condensation nuclei detector; Dust-controlled areas;emfor processing electronic devices; Electron tubes; HEPA filters; Laminar flow rooms; Leak testing;emelectron devices; Nuclei detectors (in processing electronic devices); Particulate contamination;emairborne; Semiconductor clean rooms; leak testing of high-efficiency particulate air (HEPA) filters; associated with laminar flow clean rooms/work stations, by condensation; nuclei detector, practice,;
To find similar documents by ASTM Volume:
To find similar documents by classification:
This document comes with our free Notification Service, good for the life of the document.
This document is available in either Paper or PDF format.
2006 R19 EDITION
July 1, 2019