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Scope

1.1 This practice covers the testing of the integrity of high-efficiency particulate air (HEPA) filters installed in laminar flow clean rooms of the ceiling to floor or wall to wall type, and laminar flow clean work stations. The recommended practice may be used to detect faults or voids in the filter media itself or in the joints between the filter and the room or work station structure. The determination of filter media efficiency is not within the scope of this practice.

1.2 The values stated in inch-pound units are to be regarded as the standard. The values given in parentheses are for information only.

1.3 This standard may involve hazardous materials, operations, and equipment. This standard does not purport to address all of the safety problems associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Keywords

Condensation nuclei detector; Dust-controlled areas;emfor processing electronic devices; Electron tubes; HEPA filters; Laminar flow rooms; Leak testing;emelectron devices; Nuclei detectors (in processing electronic devices); Particulate contamination;emairborne; Semiconductor clean rooms; leak testing of high-efficiency particulate air (HEPA) filters; associated with laminar flow clean rooms/work stations, by condensation; nuclei detector, practice,;Order Form

To find similar documents by ASTM Volume:

15.03 (Space Simulation; Aerospace and Aircraft; Composite Materials)

To find similar documents by classification:

13.040.30 (Workplace atmospheres Air quality of surgery rooms, see 11.080.01)

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