BS-EN-62047-16 Semiconductor devices. Micro-electromechanical devices. Test methods for determining residual stresses of MEMS films. Wafer curvature and cantilever beam deflection methods

BS-EN-62047-16 - 2015 EDITION - CURRENT


Document Center Inc. is an authorized dealer of BSI standards.
The following bibliographic material is provided to assist you with your purchasing decision:

Semiconductor devices. Micro-electromechanical devices. Test methods for determining residual stresses of MEMS films. Wafer curvature and cantilever beam deflection methods

Keywords

Integrated circuits, Electronic equipment and components, Vocabulary, Terminology, Semiconductor technology, Semiconductor devices, Electromechanical devices

To find similar documents by classification:

31.080.99 (Other semiconductor devices)

This document comes with our free Notification Service, good for the life of the document.

This document is available in Paper format.

ORDER

Price:

$158.60




Document Number

BS EN 62047-16:2015

Revision Level

2015 EDITION

Status

Current

Publication Date

July 31, 2015

Page Count

16

ISBN

9780580780806

International Equivalent

EN 62047-16:2015 IEC 62047-16:2015

Committee Number

EPL/47