BS-EN-62047-16 › Semiconductor devices. Micro-electromechanical devices. Test methods for determining residual stresses of MEMS films. Wafer curvature and cantilever beam deflection methods
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BS EN 62047-16:2015
July 31, 2015
EN 62047-16 (IEC 62047-16:2015 IEC 62047-16:2015