BS-EN-62047-17 › Semiconductor devices. Micro-electromechanical devices. Bulge test method for measuring mechanical properties of thin films
BS-EN-62047-17
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2015 EDITION
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CURRENT
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Semiconductor devices. Micro-electromechanical devices. Bulge test method for measuring mechanical properties of thin films
Keywords
Test specimens, Semiconductor technology, Electromechanical devices, Test equipment, Axial stress, Tensile testing, Semiconductor devices, Electronic equipment and components, Thin films
To find similar documents by classification:
31.080.99 (Other semiconductor devices)
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This document is available in Paper format.
Document Number
BS EN 62047-17:2015
Revision Level
2015 EDITION
Status
Current
Publication Date
July 31, 2015
Page Count
32
ISBN
9780580722035
International Equivalent
EN 62047-17:2015 IEC 62047-17:2015
Committee Number
EPL/47