BS-EN-62047-17 Semiconductor devices. Micro-electromechanical devices. Bulge test method for measuring mechanical properties of thin films

BS-EN-62047-17 - 2015 EDITION - CURRENT


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Semiconductor devices. Micro-electromechanical devices. Bulge test method for measuring mechanical properties of thin films

Keywords

Test specimens, Semiconductor technology, Electromechanical devices, Test equipment, Axial stress, Tensile testing, Semiconductor devices, Electronic equipment and components, Thin films

To find similar documents by classification:

31.080.99 (Other semiconductor devices)

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Document Number

BS EN 62047-17:2015

Revision Level

2015 EDITION

Status

Current

Publication Date

July 31, 2015

Page Count

32

ISBN

9780580722035

International Equivalent

EN 62047-17:2015 IEC 62047-17:2015

Committee Number

EPL/47