BS-EN-62047-17 Semiconductor devices. Micro-electromechanical devices

BS-EN-62047-17 - 2015 EDITION - CURRENT


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Semiconductor devices. Micro-electromechanical devices

Keywords

Test specimens,Semiconductor technology,Electromechanical devices,Test equipment,Axial stress,Tensile testing,Semiconductor devices,Electronic equipment and components,Thin films

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31.080.99 (Other semiconductor devices)

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Document Number

BS EN 62047-17:2015

Revision Level

2015 EDITION

Status

Current

Publication Date

July 31, 2015

Page Count

34

ISBN

9780580722035

International Equivalent

EN 62047-17 (IEC 62047-17:2015) AS IEC 62047-17:2015

Committee Number

EPL/47