BS-EN-62047-17 Semiconductor devices. Micro-electromechanical devices

BS-EN-62047-17 - 2015 EDITION - CURRENT


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Semiconductor devices. Micro-electromechanical devices

Keywords

Test specimens;Semiconductor technology;Electromechanical devices;Test equipment;Axial stress;Tensile testing;Semiconductor devices;Electronic equipment and components;Thin films

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31.080.99 (Other semiconductor devices)

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Document Number

BS EN 62047-17:2015

Revision Level

2015 EDITION

Status

Current

Publication Date

July 31, 2015

Page Count

34

ISBN

9780580722035

International Equivalent

EN 62047-17:2015;IEC 62047-17:2015

Committee Number

EPL/47