BS-EN-62047-17 › Semiconductor devices. Micro-electromechanical devices. Bulge test method for measuring mechanical properties of thin films
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Test specimens, Semiconductor technology, Electromechanical devices, Test equipment, Axial stress, Tensile testing, Semiconductor devices, Electronic equipment and components, Thin films
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BS EN 62047-17:2015
July 31, 2015
EN 62047-17 (IEC 62047-17:2015 IEC 62047-17:2015