BS-EN-62047-21 Semiconductor devices. Micro-electromechanical devices. Test method for Poisson's ratio of thin film MEMS materials

BS-EN-62047-21 - 2014 EDITION - CURRENT


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Semiconductor devices. Micro-electromechanical devices. Test method for Poisson's ratio of thin film MEMS materials

Keywords

Vibration, Semiconductor technology, Fatigue testing, Test specimens, Semiconductor devices, Resonance, Electronic equipment and components, Test equipment, Thin-film devices, Bend testing, Electromechanical devices, Integrated circuits

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31.080.99 (Other semiconductor devices)

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Document Number

BS EN 62047-21:2014

Revision Level

2014 EDITION

Status

Current

Publication Date

Oct. 31, 2014

Page Count

16

ISBN

9780580775543

International Equivalent

EN 62047-21:2014 IEC 62047-21:2014

Committee Number

EPL/47