BS-EN-62047-21 › Semiconductor devices. Micro-electromechanical devices. Test method for Poisson's ratio of thin film MEMS materials
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Vibration, Semiconductor technology, Fatigue testing, Test specimens, Semiconductor devices, Resonance, Electronic equipment and components, Test equipment, Thin-film devices, Bend testing, Electromechanical devices, Integrated circuits
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BS EN 62047-21:2014
Oct. 31, 2014
EN 62047-21:2014 IEC 62047-21:2014