BS-EN-62047-21 Semiconductor devices. Micro-electromechanical devices

BS-EN-62047-21 - 2014 EDITION - CURRENT


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Semiconductor devices. Micro-electromechanical devices

Keywords

Vibration;Semiconductor technology;Fatigue testing;Test specimens;Semiconductor devices;Resonance;Electronic equipment and components;Test equipment;Thin-film devices;Bend testing;Electromechanical devices;Integrated circuits

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31.080.99 (Other semiconductor devices)

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Document Number

BS EN 62047-21:2014

Revision Level

2014 EDITION

Status

Current

Publication Date

Oct. 31, 2014

Page Count

18

ISBN

9780580775543

International Equivalent

EN 62047-21:2014;IEC 62047-21:2014

Committee Number

EPL/47