BS-EN-62047-22 Semiconductor devices. Micro-electromechanical devices

BS-EN-62047-22 - 2014 EDITION - CURRENT


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Semiconductor devices. Micro-electromechanical devices

Keywords

Thin-film devices;Semiconductor technology;Semiconductor devices;Electromechanical devices;Electronic equipment and components;Test equipment;Fatigue testing;Resonance;Integrated circuits;Test specimens;Bend testing;Vibration

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Document Number

BS EN 62047-22:2014

Revision Level

2014 EDITION

Status

Current

Publication Date

Oct. 31, 2014

Page Count

14

ISBN

9780580775550

International Equivalent

IEC 62047-22:2014;EN 62047-22:2014

Committee Number

EPL/47