BS-EN-62047-26 Semiconductor devices. Micro-electromechanical devices

BS-EN-62047-26 - 2016 EDITION - CURRENT


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Semiconductor devices. Micro-electromechanical devices

Keywords

Thin films;Semiconductor devices;Test equipment;Electronic equipment and components;Test specimens;Integrated circuits;Tensile testing;Semiconductor technology;Electromechanical devices

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31.080.99 (Other semiconductor devices)

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Document Number

BS EN 62047-26:2016

Revision Level

2016 EDITION

Status

Current

Publication Date

May 31, 2016

Page Count

34

ISBN

9780580853098

International Equivalent

EN 62047-26:2016;EN 60793-2-30:2009;IEC 62047-26:2016

Committee Number

EPL/47