BS-IEC-63068-4 › Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices
BS-IEC-63068-4
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2022 EDITION
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CURRENT
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Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices
Keywords
Semiconductor devices;Silicon carbide;Defects;Inspection;Evaluation
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31.080.99 (Other semiconductor devices)
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Document Number
BS IEC 63068-4:2022
Revision Level
2022 EDITION
Status
Current
Publication Date
Sept. 7, 2022
Page Count
28
ISBN
9780539184174
International Equivalent
IEC 63068-4 Ed.1.0
Committee Number
EPL/47