BS-ISO-14606 › Surface chemical analysis. Sputter depth profiling. Optimization using layered systems as reference materials
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Surface chemical analysis. Sputter depth profiling. Optimization using layered systems as reference materials
Keywords
X-ray photoelectron spectroscopy;Photoelectron spectroscopy;X-rays;Spectroscopy;Depth;Chemical analysis and testing
To find similar documents by classification:
71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)
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Document Number
BS ISO 14606:2022
Revision Level
2022 EDITION
Status
Current
Publication Date
Feb. 15, 2023
Replaces
BS ISO 14606:2015
Page Count
26
ISBN
9780539183597
International Equivalent
ISO 14606:2022
Committee Number
CII/60