BS-ISO-14701 › Surface chemical analysis. X-ray photoelectron spectroscopy. Measurement of silicon oxide thickness
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Surface chemical analysis. X-ray photoelectron spectroscopy. Measurement of silicon oxide thickness
Keywords
Spectroscopy;Thickness measurement;Photoelectron spectroscopy;X-ray photoelectron spectroscopy;Surface chemistry;Silicon;Chemical analysis and testing;Surface properties;Oxides;Electron emission
To find similar documents by classification:
71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)
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Document Number
BS ISO 14701:2018
Revision Level
2018 EDITION
Status
Current
Publication Date
Nov. 5, 2018
Replaces
BS ISO 14701:2011
Page Count
26
ISBN
9780580519499
International Equivalent
ISO 14701:2018
Committee Number
CII/60