BS-ISO-14701-TC Tracked Changes. Surface chemical analysis. X-ray photoelectron spectroscopy. Measurement of silicon oxide thickness

BS-ISO-14701-TC - 2018 EDITION - CURRENT


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Tracked Changes. Surface chemical analysis. X-ray photoelectron spectroscopy. Measurement of silicon oxide thickness

Keywords

Spectroscopy;Thickness measurement;Photoelectron spectroscopy;X-ray photoelectron spectroscopy;Surface chemistry;Silicon;Chemical analysis and testing;Surface properties;Oxides;Electron emission

To find similar documents by classification:

71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)

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Document Number

BS ISO 14701:2018 - TC

Revision Level

2018 EDITION

Status

Current

Publication Date

Feb. 27, 2020

Page Count

54

ISBN

9780539118209

Committee Number

CII/60