BS-ISO-14701-TC › Tracked Changes. Surface chemical analysis. X-ray photoelectron spectroscopy. Measurement of silicon oxide thickness
BS-ISO-14701-TC
-
2018 EDITION
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CURRENT
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Tracked Changes. Surface chemical analysis. X-ray photoelectron spectroscopy. Measurement of silicon oxide thickness
Keywords
Spectroscopy;Thickness measurement;Photoelectron spectroscopy;X-ray photoelectron spectroscopy;Surface chemistry;Silicon;Chemical analysis and testing;Surface properties;Oxides;Electron emission
To find similar documents by classification:
71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)
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Document Number
BS ISO 14701:2018 - TC
Revision Level
2018 EDITION
Status
Current
Publication Date
Feb. 27, 2020
Page Count
54
ISBN
9780539118209
Committee Number
CII/60